JPH02106828U - - Google Patents
Info
- Publication number
- JPH02106828U JPH02106828U JP1469590U JP1469590U JPH02106828U JP H02106828 U JPH02106828 U JP H02106828U JP 1469590 U JP1469590 U JP 1469590U JP 1469590 U JP1469590 U JP 1469590U JP H02106828 U JPH02106828 U JP H02106828U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotating body
- wafer holder
- lateral position
- orientation flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1469590U JPH034034Y2 (en]) | 1990-02-19 | 1990-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1469590U JPH034034Y2 (en]) | 1990-02-19 | 1990-02-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02106828U true JPH02106828U (en]) | 1990-08-24 |
| JPH034034Y2 JPH034034Y2 (en]) | 1991-02-01 |
Family
ID=31226127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1469590U Expired JPH034034Y2 (en]) | 1990-02-19 | 1990-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH034034Y2 (en]) |
-
1990
- 1990-02-19 JP JP1469590U patent/JPH034034Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH034034Y2 (en]) | 1991-02-01 |